Equivalent Circuit Model of an Optomechanical MEMS Electric Field Strength Sensor

نویسندگان
چکیده

برای دانلود باید عضویت طلایی داشته باشید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

A Simplified Equivalent Circuit Model of MEMS Electrostatic Actuator

Modeling a MEMS (Micro Electro-Mechanical Systems) electrostatic actuator in electrical domain is important for system simulation of the actuator along with its associated electronics. For instance, an integrated MEMS resonator used in a serial I/O PLL design modeled in electrical domain enables to optimize the system with the rest of the electronics. In this work, we have developed a simplifie...

متن کامل

Characterization Techniques for a MEMS Electric-Field Sensor in Vacuum

An accurate calibration of an electric-field sensor is difficult to carry out due to challenges involved in generating a uniform electric field over the sensor volume. Additionally, capacitive coupling between the field source and the sensors and related instrumentation tends to distort the measured field further. Sensor characterization includes not only calibration, but also determination of ...

متن کامل

An equivalent-circuit model for MEMS electrostatic actuator using open-source software Qucs

We report an equivalent circuit model for MEMS (microelectromechanical systems) electrostatic actuator using open-source circuit simulator Qucs (quite universal circuit simulator). Electrostatic force, equation of motion, and Kirchhoff’s laws are implemented by using the EDD (equation defined device) function of Qucs. Mathematic integral operation in the equation of motion is interpreted into e...

متن کامل

Model Order Reduction for the extraction of small signal equivalent circuit models of RF-MEMS

A reduced order model for the small signal analysis of micromechanical structures (MEMS) has been extracted by applying model order reduction (MOR) to their finite element models. The low-order model conserves the accuracy belonging to the finite element method, while drastically reducing the computational time. Moreover, it gives a description of the device’s terminal behaviour and can therefo...

متن کامل

New Design of Mems piezoresistive pressure sensor

The electromechanical analysis of a piezoresistive pressure microsensor with a square-shaped diaphragm for low-pressure biomedical applications is presented. This analysis is developed through a novel model and a finite element method (FEM) model. A microsensor with a diaphragm 1000 „m length and with thickness=400 µm is studied. The electric response of this microsensor is obtained with applyi...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

ژورنال

عنوان ژورنال: Proceedings

سال: 2018

ISSN: 2504-3900

DOI: 10.3390/proceedings2130712